发明名称 SEMICONDUCTOR DEVICE AND ITS MANUFACTURING METHOD
摘要 <P>PROBLEM TO BE SOLVED: To achieve strong bonding between a stud bump and a corresponding electrode pad when flip-chip mounting a semiconductor chip on a mounting substrate by using ultrasonic bonding without causing an excessive deformation such that affects high-frequency characteristics in the stud bump. <P>SOLUTION: A semiconductor device is composed of the mounting substrate and the semiconductor chip mounted on the mounting substrate via metal bumps. The metal bumps are respectively composed of an internal part bonded with the semiconductor chip and an external part covering the internal part. The external part has hardness higher than that of the internal part. <P>COPYRIGHT: (C)2008,JPO&INPIT
申请公布号 JP2007266131(A) 申请公布日期 2007.10.11
申请号 JP20060086536 申请日期 2006.03.27
申请人 FUJITSU LTD 发明人 ABE TOMOYUKI;IIJIMA SHINYA
分类号 H01L21/60 主分类号 H01L21/60
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