| 摘要 |
PROBLEM TO BE SOLVED: To reduce, as much as possible the probability of the occurrence of a curtain-like ununiformal supply of treatment liquid on a substrate surface, by supplying an amount of two steps of the treatment liquid like a curtain, and to improve the performance of replacement of the treatment liquid by increasing the amount of supply of treatment liquid. SOLUTION: A substrate equipment, which treats a substrate B transferred on a transferring path in a treatment chamber 12. includes an inlet nozzle portion 20 located above the transfer path. The inlet nozzle portion 20 has a first nozzle portion comprising first and second members 20A, 20B and a second nozzle portion comprising the second and a third members 20B, 20C together. Rinsing liquids are discharged from discharge outlets 2012a, 2022a of the first and second nozzle portions, in a direction of the width of the substrate the shape of a curtain, respectively. COPYRIGHT: (C)2008,JPO&INPIT
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