| 摘要 |
PROBLEM TO BE SOLVED: To provide a semiconductor manufacturing apparatus and a semiconductor manufacturing method capable of treating a wafer with a chemical liquid in an appropriate state efficiently, by detecting whether a filter has been torn by circulating chemical liquid treatment. SOLUTION: The semiconductor manufacturing apparatus comprises: a wafer treatment chamber 11 for treating a wafer by a circulating chemical liquid; a circulation line 12 of the circulating chemical liquid; a first filter 13 that is installed in the circulation line 12 and captures particles in the circulating chemical liquid discharged from the wafer treatment chamber 11; a particle counter 14 that is installed at the primary or secondary side of the first filter 13, and measures the number of particles in the circulating chemical liquid; and an arithmetic processing means 18 for calculating the time differential value of the number of measured particles. COPYRIGHT: (C)2008,JPO&INPIT
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