| 摘要 |
PROBLEM TO BE SOLVED: To provide a wafer holder capable of simultaneously transporting a wafer and a cross-sectional sample made from the wafer, and reduced in size and weight; and to provide a sample preparation device capable of simultaneously transporting a wafer and a cross-sectional sample by the wafer holder, and reduced in the size of the whole device. SOLUTION: This wafer holder is provided with: a holder body 31 formed into a frame-like shape having an opening 31a at the center thereof and capable of mounting a wafer W on its upper surface 31b; a guide part 32 coming into contact with an outer periphery W1 of the wafer W mounted on the holder body 31 for positioning the wafer W on the holder body 31; and a cross-sectional sample holding part 33 arranged in a circumferential part 31 of the holder body 31 for holding a cross-sectional sample made from the wafer W. The cross-sectional sample holding part 33 is provided with a plate-like sample base 36 for fixing the cross-sectional sample thereto, and a fixing base 35 detachably catching the sample base 36 and detachably mounted to the holder body 31. COPYRIGHT: (C)2008,JPO&INPIT
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