MAGNESIUM OXIDE THIN FILM AND ITS MANUFACTURING METHOD

摘要

PROBLEM TO BE SOLVED: To provide a magnesium oxide thin film which has larger effect of decreasing discharge voltage of an AC type PDP, and can be manufactured more easily industrially than those made by conventional applying method. SOLUTION: The magnesium oxide thin film comprises a magnesium oxide crystalline phase and an amorphous phase, and ratio of crystalline phase to amorphous phase in a surface region on one side is larger than that in a central region. COPYRIGHT: (C)2008,JPO&INPIT