| 摘要 |
PROBLEM TO BE SOLVED: To provide a substrate holder to hold processed substrates, the holder to hold processed substrates as standing in a vertical direction preventing scratches or cracks in a part in contact with the processed substrate of a substrate receiving part by impact upon setting the processed substrate or impact by vibration during conveyance after setting or preventing minute scratches after the process. SOLUTION: The holder holds processed substrates by two or more substrate receiving parts each being, on its upper side, in contact with lower end faces of processed substrates and supporting the processed substrates at the lower end faces. Each of the all or a part of the substrate receiving parts are substrate receiving part with an elastic member: the substrate receiving part having an elastic member comprising an elastic part or having an elastic part which is, on its upper side, in contact with the lower end faces of the processed substrates and is deformed by receiving force at the lower side from the processed substrates and generates upward force by deformation; and the receiving part with the elastic member supporting the processed substrates by the upward force in a state the elastic member is deformed by receiving force from the processed substrates, and the processed substrates are held by the total support of the substrate receiving parts. COPYRIGHT: (C)2008,JPO&INPIT
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