发明名称 QUARTZ GLASS MEMBER FORMED WITH ROUGHENED LAYER ON SURFACE
摘要 <p><P>PROBLEM TO BE SOLVED: To roughen a quartz glass surface without surface processing. <P>SOLUTION: Slurry prepared by adding water to pulverized synthetic silica powder 2 having a particle size of 40μm or less and agar is applied on the surface of a quartz glass sheet 1, to form a coating layer 3. The coating layer 3 is dried by vaporizing moisture at 30°C, defatted and sintered and then a roughened layer 4 is formed by fusing the coating layer 3 on the quartz glass sheet 1 in a state that projections of the synthetic silica powders 2 are remained. The surface of the roughened layer is fired and finished with oxyhydrogen flame and then quartz glass coated with a high purity roughened layer is obtained. <P>COPYRIGHT: (C)2008,JPO&INPIT</p>
申请公布号 JP2007261875(A) 申请公布日期 2007.10.11
申请号 JP20060088824 申请日期 2006.03.28
申请人 TOSOH QUARTZ CORP 发明人 MATSUDA TAKASHI;SATO MIYUKI
分类号 C03C17/04;H01L21/22;H01L21/31 主分类号 C03C17/04
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