| 摘要 |
PROBLEM TO BE SOLVED: To provide a discharge plasma generation assist device capable of reducing a discharge start voltage, and prolonging a service life. SOLUTION: The device includes an electron source 10 arranged near a cathode electrode 2a in an airtight container 1 with discharge gas sealed for supplying electrons in the discharge gas, and two protecting members 21, 22 for protecting the electron source 10 from ions of a discharge plasma. The respective protecting members 21, 22 are formed of conductive material respectively, and include a plurality of opening parts 21a, 22a for passing the electrons discharged from the electron source 10. A potential of a second protecting member 22 is set to be lower than a potential of an anode electrode 2b and be higher than a potential of the cathode electrode 2a. The respective potentials of the respective protecting members 21, 22, anode electrode 2b, and cathode electrode 2a are controlled by a control part which is not shown. COPYRIGHT: (C)2008,JPO&INPIT
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