发明名称 |
In-line process for making thin film electronic devices |
摘要 |
An in-line process for making a thin film electronic device on a substrate is described comprising the steps of: a) depositing a structurable layer onto a substrate; b) depositing a patternable material onto the structurable layer in a first pattern; and c) etching the structurable layer in areas uncovered by the patternable material. The steps are carried out without intermediate exposure of the substrate to ambient air.
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申请公布号 |
US2007238054(A1) |
申请公布日期 |
2007.10.11 |
申请号 |
US20070709785 |
申请日期 |
2007.02.23 |
申请人 |
KOK RONALDUS JOHANNES C M;EVERS MARINUS FRANCISCUS J;DINGS FRANCISCUS C |
发明人 |
KOK RONALDUS JOHANNES C.M.;EVERS MARINUS FRANCISCUS J.;DINGS FRANCISCUS C. |
分类号 |
H01L21/00 |
主分类号 |
H01L21/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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