| 摘要 |
PROBLEM TO BE SOLVED: To provide a method and system for a multifocal X-ray system. SOLUTION: An X-ray inspection system 10 includes an electron gun 20, a fixed anode 22 made of a high-density material, and an apparatus for adjusting a direction of an electron beam 32 generated by the electron gun 20 located on the anode to a plurality of focal points 44. A detector 14 includes a plurality of individual detector elements 38. The operation of the present system is performed by directing the electron beam to a first focal point, located on the anode, during a first time interval and by generating an array of X-ray beams 46 in a first detector element. During a second time interval, the electron beam is directed at a second focal point so located on the anode as to be spaced apart from the first focal point, thereby generating an array of second X-ray beams in a second detector element. This cycle is repeated in a one- or two-dimensional pattern with respect to an additional focal point. Outputs of the detector elements are read in accordance with the location of the electron beam. COPYRIGHT: (C)2008,JPO&INPIT |
