| 摘要 |
PROBLEM TO BE SOLVED: To remove a longitudinal streak noise by a simple means, in a substrate inspection device and a method. SOLUTION: This device has a constitution equipped with a line illumination unit 3; a line sensor camera 6; a substrate holding moving unit 4 for moving them and a substrate relatively in the sub-scanning direction; a device control part 13 for acquiring a two-dimensional scanning image of the substrate by controlling moving operation of the substrate holding moving unit 4 and imaging operation of the line sensor camera 6; an image noise processing part 15 having a longitudinal streak noise detection means for detecting the longitudinal streak noise by operating image data of the scanning image, and a longitudinal streak noise removal means for removing the longitudinal streak noise detected by the longitudinal streak noise detection means and generating a corrected image; and a defect extraction processing part 16 for performing defect extraction from the corrected image. COPYRIGHT: (C)2008,JPO&INPIT
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