| 摘要 |
An antireflective coating is disclosed. The antireflective coating includes a first high index of refraction coating layer; a first low index of refraction coating layer over the first high index of refraction coating layer; a second high index of refraction coating layer over the first low index of refraction coating layer; and a second low index of refraction coating layer over the second high index of refraction coating layer, wherein the first high index of refraction coating layer has an optical thickness defined by the following equation within a range of ±25%: [-2.1643x(optical thickness of the second low index of refraction coating layer)<SUP>2</SUP>]+[4.6684x(optical thickness of the second low index of refraction coating layer)]-2.2187, or the first low index of refraction coating layer has an optical thickness defined by the following equation within a range of ±25%: [2.0567x(optical thickness of the second low index of refraction coating)<SUP>2</SUP>]-[3.5663x(optical thickness of the second low index of refraction coating)]+1.8467, or the second high index of refraction coating layer has an optical thickness defined by the following equation within a range of ±25%: [-0.3987x(optical thickness of the second low index of refraction coating layer)<SUP>2</SUP>]-[1.1576x(optical thickness of the second low index of refraction coating layer)]+2.7462.
|
