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发明名称
Method of producing a silicon semiconductor device
摘要
申请公布号
US3264201(A)
申请公布日期
1966.08.02
申请号
US19620217011
申请日期
1962.08.15
申请人
SIEMENS-SCHUCKERTWERKE AKTIENGESELLSCHAFT
发明人
SCHINK NORBERT;STOIBER RUPERT
分类号
H01L21/316;H01L23/29
主分类号
H01L21/316
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