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发明名称
METHOD FOR REMOVING DEFECTIVE MATERIAL FROM A LITHOGRAPHY MASK
摘要
申请公布号
EP1842098(A1)
申请公布日期
2007.10.10
申请号
EP20060703614
申请日期
2006.01.26
申请人
QIMONDA AG
发明人
CRELL, CHRISTIAN;NOELSCHER, CHRISTOPH;VERBEEK, MARTIN
分类号
G03F1/00
主分类号
G03F1/00
代理机构
代理人
主权项
地址
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