| 摘要 |
FIELD: tool-making industry, possible use for precise mechanical processing of multi-layer silicon plates. ^ SUBSTANCE: in accordance to the invention, control over spatial position of object is performed on basis of usage of spherical element 3, positioned between first 21 and second 22 elements. Its parts are positioned in recesses 21a, 22a, respectively, created in first and second elements 21, 22 in form of flat plates. Spherical element 3 is connected to first and second elements 21 and 22 by flat plate of resiliently deformable adhesive 6. ^ EFFECT: increased precision. ^ 2 cl, 4 dwg |
