APPARATUS FOR DETECTING SPLIT OF WATER CURTAIN

摘要

A device for detecting a split of a water curtain is provided to prevent a water curtain for cleaning a glass substrate from being split. A device for detecting a split of a water curtain comprises an ultrasonic wave transmitting unit(50), an ultrasonic wave receiving unit(60), and a receiving and transmitting controller. The ultrasonic wave transmitting unit is installed on a water curtain(30) formed by a water curtain injection knife(20) to transmit an ultrasonic signal to the water curtain. The ultrasonic wave receiving unit is installed between the bottom portion of the water curtain and a glass substrate to receive the ultrasonic signal which is transmitted from the ultrasonic wave transmitting unit, passing through a split portion of the water curtain. The receiving and transmitting controller is connected with the ultrasonic wave transmitting and receiving units electrically to control transmitting and receiving of the ultrasonic signal and detect the split portion of the water curtain. The ultrasonic wave transmitting and receiving units include plural transmitting and receiving sensors(52,62), respectively.