发明名称 Probe card assembly with dielectric structure
摘要 A probe card assembly for providing electrical interconnection between a semiconductor device to be tested and a test system is provided. The probe card assembly includes a plurality of probes supported by a support substrate, each of the plurality of probes including an end portion extending away from the support substrate. The end portion is configured to be electrically connected to a semiconductor device to be tested. The probe card assembly also includes a dielectric sheet positioned between the support substrate and the end portion of the plurality of probes such that the probes extend through apertures defined by the dielectric sheet.
申请公布号 US7279911(B2) 申请公布日期 2007.10.09
申请号 US20050121241 申请日期 2005.05.03
申请人 SV PROBE PTE LTD. 发明人 TUNABOYLU BAHADIR;KILICASLAN HABIB
分类号 G01R31/02 主分类号 G01R31/02
代理机构 代理人
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