| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a method of manufacturing a needle-like electron emitter capable of forming the electron emitter which is excellent in electron emitting properties and has an excellent directivity and an uniform shape only by operating condition of a crystal growth process. <P>SOLUTION: The method of manufacturing the needle-like electron emitter for the electron-emitting element includes a process for forming an island shape seed crystal body by growing metal gallium on a surface of a board after setting a board temperature from 500 to 600°C, a process for forming a column crystal perpendicular to the surface on the seed crystal body by growing gallium nitride on the surface after setting the board temperature from 950 to 1050°C, and a process for forming a tapered sharp tip end part at a tip end of the column crystal body by supplying a nitrogen source and a gallium source on the surface and growing gallium nitride. In the process for forming the tapered sharp tip end part, the board temperature is set at equal to or lower than 950°C or supply amount of one or both of the nitrogen source or the gallium source is smaller than those for the above processes. <P>COPYRIGHT: (C)2008,JPO&INPIT</p> |
