COMPOSITION FOR FORMING ELECTRICAL INSULATION FILM, RELATED POLYMER AND METHOD FOR PRODUCING THE SAME, METHOD FOR PRODUCING ELECTRICAL INSULATION FILM, AND SILICA-BASED ELECTRICAL INSULATION FILM

摘要

PROBLEM TO BE SOLVED: To provide a composition for forming an electrical insulation film capable of forming electrical insulation film with low hygroscopicity and dielectric constant, high etching resistance and chemical liquid resistance and high mechanical strength; to provide a polymer related thereto and a method for producing the polymer; to provide a method for producing such electrical insulation film; and to provide silica-based electrical insulation film. SOLUTION: The electrical insulation film-forming composition comprises the polymer obtained by co-condensation between (A) at least one silane monomer of the general formula(1) and (B) a hydrolyzable group-containing carbosilane and an organic solvent. COPYRIGHT: (C)2008,JPO&INPIT