| 摘要 |
Embodiments in accordance with the present invention provide straightening plates at the upstream side of a cleaning tank and a straightening plate at the downstream side of the object to be cleaned. Apertures are arranged in the planes of the respective straightening plates. An aperture ratio of the upstream straightening plates is set larger than the ratio of the downstream straightening plate. For example, the aperture ratio of the upstream straightening plate may be set at a value between 10% and 25%, and the aperture ratio of the downstream straightening plate is set at a value between 2.5% and 10%. With this, the flow of liquid in the cleaning chamber sandwiched between the upstream and downstream straightening plates can be brought to a pseudo-laminar flow. Contaminants separated from the object to be cleaned are moved quickly to the discharge chamber and are removed by a filter.
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