Verfahren zur Herstellung einer akustischen Oberflächenwellenanordnung

摘要

A surface acoustic wave device includes a piezoelectric substrate (1), a first surface acoustic wave element (30) having at least one interdigital transducer on the piezoelectric substrate, a second surface acoustic wave element (40) having at least one interdigital transducer which is provided on the piezoelectric substrate. The at least one interdigital transducer of the second surface acoustic wave element has a thickness that is different from the interdigital transducer of the first surface acoustic wave element, and the second surface acoustic wave element has a frequency characteristic that is different from that of the first surface acoustic wave element. An insulating film (3) is applied to the first and second surface acoustic wave elements. A thickness of the insulating film at a region on the first surface acoustic wave element is different from the thickness of a region on the second surface acoustic wave.