| 摘要 |
A method and apparatus for transferring wafers within a processing chamber is disclosed. To save space, wafers can be placed perpendicularly in random access input and random access output stations adjacent to the processing chamber. To move the wafers from the random access input station to the processing chamber and then to the random access output station, a rotatable gripper is provided. The gripper normally lies in a plane perpendicular to the wafer chuck, but the gripper is rotatable about ±90° clockwise and about ±90° counterclockwise so that the wafers can be gripped in the random access input station, released onto the wafer chuck, and re-gripped and released into the random access output station.
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