发明名称 Method of manufacturing plasma display panel and photomask to be used in the method
摘要 Provided is a method of manufacturing a plasma display panel and a photomask to be used for manufacturing the plasma display panel. The method includes forming a conductive layer and a photoresist layer covering the conductive layer on a first substrate using a green sheet method, exposing and developing the photoresist layer to form a remaining photoresist layer that comprises a plurality of line pairs comprising a first line and a second line separated from each other and the first and second lines respectively comprise a plurality of stripe patterns extending in a direction and short bars that connect the stripe patterns wherein the widths of the stripe patterns and short bars near portions where the stripe patterns and short bars meet each other are formed smaller than the widths of the other portions of the stripe patterns and short bars, and forming a plurality of bus electrode pairs comprising a first bus electrode and a second bus electrode by etching portions of the conductive layer outside the remaining photoresist layer, wherein the first and second bus electrodes respectively comprise a plurality of strip shaped electrodes extending in a direction and short bars that connect the strip shaped electrodes.
申请公布号 US2007232038(A1) 申请公布日期 2007.10.04
申请号 US20070726107 申请日期 2007.03.21
申请人 LEE HYO-SUK 发明人 LEE HYO-SUK
分类号 H01L21/26;H01L21/42 主分类号 H01L21/26
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