| 摘要 |
PROBLEM TO BE SOLVED: To provide an MEMS (Micro Electro Mechanical System) device wherein vibration can be suppressed. SOLUTION: The MEMS device 10 includes: a substrate; a rocking member (micromirror) 12 supported on the substrate so that it can be rocked; and a pair of electrodes 18A, 18B and 19A, 19B for rocking and driving the rocking member 12 utilizing an electrostatic force. The MEMS device 10 is so constituted that the rocking member 12 is rocked by the electrostatic force generated by an alternating-current voltage applied between the pair of electrodes 18A, 18B and 19A, 19B. A vibration isolating member 51 that can be rocked is attached to the substrate. COPYRIGHT: (C)2008,JPO&INPIT
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