发明名称 PIEZOELECTRIC ACTUATOR UNIT, PIEZOELECTRIC ELEMENT AND ITS MANUFACTURING METHOD
摘要 <P>PROBLEM TO BE SOLVED: To stabilize the liquid discharge characteristics, to obtain a necessary discharge quantity (delivery quantity) while being driven at high frequency, to enhance a manufacturing reliability, and to improve yield. <P>SOLUTION: The piezoelectric element 26 of a multilayer structure has an upper piezoelectric substance layer 34 and a lower piezoelectric substance layer 35 which are stacked. A driving electrode 33 is formed between the upper piezoelectric substance layer 34 and the lower piezoelectric substance layer 35. A common upper electrode 36 is formed on the surface of the upper piezoelectric substance layer 34 and a common lower electrode 37 is formed between the lower piezoelectric substance 35 and a vibrator 23. Both the ends of the lower piezoelectric substance layer 35 in the direction of its length are extended outward from both the ends of a pressure chamber. Also, both the ends of the upper piezoelectric substance layer 34 in the direction of its length are extended outward from both the ends of the pressure chamber. <P>COPYRIGHT: (C)2008,JPO&INPIT
申请公布号 JP2007258727(A) 申请公布日期 2007.10.04
申请号 JP20070089289 申请日期 2007.03.29
申请人 SEIKO EPSON CORP 发明人 ZHANG JUNHUA;KATAKURA TAKAHIRO;OKUMURA SUKENORI
分类号 H01L41/09;B41J2/045;B41J2/055;B41J2/135;B41J2/14;B41J2/145;B41J2/16;F04B43/04;H01L41/187;H01L41/22;H01L41/29;H01L41/331 主分类号 H01L41/09
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