| 摘要 |
PROBLEM TO BE SOLVED: To provide a water quality evaluation method capable of evaluating evaluated water in a simple procedure, and capable of restraining remarkably a substrate surface from being deteriorated and/or contaminated when the substrate is conveyed to an analytical facility, and a substrate holding vessel used for the water quality evaluation method. SOLUTION: A tube joint 4 of a sampling tube 3 is removably connected to a valve 20 upstream of an introduction tube 18 adjacent to a water supply port 14 of the holding vessel 10. Ball valves 20-22 are connected respectively to the introduction tube 18, an introduction tube 19 and an effluent tube 17, as opening and closing valves. The water supply port 14 and a drain port 15 are connected screwedly to a tube 16 and the tube 17, and the respective tubes 18, 19, 17 are connected screwedly to the valves 20-22. COPYRIGHT: (C)2008,JPO&INPIT
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