| 摘要 |
An array-type capacitive sensor for measuring a surface defect of metal is provided to detect the defect on the metal surface accurately by using electrodes between which capacitance is formed. An array-type capacitive sensor for measuring a surface defect of metal comprises a capacitive probe, a power source(13), and a detecting unit. The capacitive probe is composed of metallic negative and positive electrodes(11,12) positioned adjacently on the same plain surface. The power source supplies power to the positive electrode. The detecting unit detects the changes of capacitance between the positive and negative electrodes when inspecting a metallic sample with the negative and positive electrodes and determines existence of a defect on the metallic sample.
|
