| 摘要 |
PROBLEM TO BE SOLVED: To provide nanoparticles containing no large particles regarding a technique for producing nanoparticles. SOLUTION: An evaporation material 135 is arranged at a coaxial type arc deposition source 13, and the vapor of the evaporation material is released into an anode electrode 131 by arc discharge. Electrons receive Lorentz force from a magnetic field formed by arc current, so as to be discharged into a vacuum tank 10. Fine vapor having a positive charge is attracted to the electrons, is released into the vacuum tank 10, and is stuck to the surface of a collection plate 20, so as to form the nanoparticles of the evaporation material. Huge droplets are collided against the wall face of the anode electrode 131, and are not released into the vacuum tank 10. COPYRIGHT: (C)2008,JPO&INPIT
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