| 摘要 |
A substrate processing apparatus and a substrate transferring method are provided to precisely position a substrate to a substrate supporting/rotating mechanism when the substrate is transferred between a substrate transfer mechanism and the substrate supporting/rotating mechanism. A substrate supporting/rotating unit(5) supports and rotates a substrate(W), and a positioning member(55) is installed on the substrate supporting/rotating unit to position the substrate on the substrate supporting/rotating unit. A substrate transfer unit(52) transfers the substrate to the substrate supporting/rotating unit. A squeeze unit is installed on the substrate transfer unit to squeeze the substrate against the positioning unit. The squeeze unit has a substrate contact portion contacting an end of the substrate and a moving portion moving the substrate contact portion towards the positioning member.
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