| 摘要 |
PROBLEM TO BE SOLVED: To keep transmission of data from a recipe execution controller to a sub-controller without shutting down communication immediately even in the occurrence of an error. SOLUTION: When a temperature controller 7 requests initialization sequence to a recipe execution controller 3, a recipe related parameter is downloaded to the temperature controller 7. In the case of being unsuccessful in downloading of the parameter, the temperature controller 7 makes a response of NG to the recipe execution controller 3. Then, the parameter of the same data is re-transmitted from the recipe execution controller 3 to the temperature controller 7 for downloading. When the temperature controller 7 cannot download the parameter normally, the response of the NG is returned from the temperature controller 7 to the recipe execution controller 3. Then, the recipe execution controller 3 performs the third transmission of the parameter of initial value data on a safety side to make the temperature controller 7 download this. COPYRIGHT: (C)2008,JPO&INPIT
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