| 摘要 |
PROBLEM TO BE SOLVED: To inhibit a dynamic quantity measuring device composed of a single crystal silicone substrate from breaking by a large distortion. SOLUTION: On the rear face of the sensor chip formed with a semiconductor single crystal substrate, a distortion detector mounted plate for measuring the distortion is provided. Even if a large distortion happens to occur, the distortion occurred in the object body to be measured can be controlled by the mounted plate, therefore the semiconductor single crystal substrate does't be broken. Consequently, the dynamic quantity measurement device of high reliability can be provided. COPYRIGHT: (C)2008,JPO&INPIT
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