Device for holding an imprint lithography template

摘要

A device for holding an imprint lithography template comprises a body which body comprises an opening, wherein the opening is configured to receive the imprint lithography template. A supporting date is coupled to the body. A piezosystem is coupled to the body to vary the dimensions of the template. The piezosystem comprises a plurality of piezo actuators coupled to the body, wherein the piezo actuators are configured to apply a compressive force to the template disposed within the opening.