发明名称 Die handling system
摘要 A system may include singulation of a semiconductor wafer to separate a plurality of integrated circuit die that are integrated into the semiconductor wafer; coupling of a support to an integrated circuit substrate of one of the plurality of integrated circuit die, and decoupling of the one integrated circuit die from the singulated semiconductor wafer while the support is coupled to the integrated circuit substrate. According to some embodiments, a second side of the one integrated circuit die is not touched during the coupling and the decoupling, the second side being opposite to the integrated circuit substrate.
申请公布号 US7276396(B2) 申请公布日期 2007.10.02
申请号 US20040959931 申请日期 2004.10.06
申请人 INTEL CORPORATION 发明人 GARCIA JASON A.
分类号 H01L21/00 主分类号 H01L21/00
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