| 摘要 |
A substrate supporting mechanism and a substrate processing apparatus are provided to surely prevent a discharge from happening between a first region and a second region of a heating element. A platform(5) for supporting a substrate has a heating element(54) made of silicon carbide located in a predetermined pattern. A power feeding electrode(61) feeds an electric power to the power feeding electrode. A partition made of insulator is interposed between adjacent portions of the heating element. The platform has a cover(55) covering an upper surface of the heating element, and the partition is protruded from a rear surface of the cover. The platform has an insulating member(53) provided on a lower portion of the heating element.
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