发明名称 Dielectric material having carborane derivatives
摘要 Numerous embodiments of an apparatus and method of a dielectric material having a low dielectric constant and good mechanical strength are described. In one embodiment a dielectric material having multiple porous regions is disposed over a substrate. A caged structure is bridged within the plurality of pores. In one particular embodiment, the caged structure may be carborane or a carborane derivative.
申请公布号 US2007224834(A1) 申请公布日期 2007.09.27
申请号 US20060582720 申请日期 2006.10.17
申请人 HAVERTY MICHAEL G;CHEN TIM T;SHANKAR SADASIVAN 发明人 HAVERTY MICHAEL G.;CHEN TIM T.;SHANKAR SADASIVAN
分类号 H01L21/31 主分类号 H01L21/31
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