发明名称 |
Dielectric material having carborane derivatives |
摘要 |
Numerous embodiments of an apparatus and method of a dielectric material having a low dielectric constant and good mechanical strength are described. In one embodiment a dielectric material having multiple porous regions is disposed over a substrate. A caged structure is bridged within the plurality of pores. In one particular embodiment, the caged structure may be carborane or a carborane derivative.
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申请公布号 |
US2007224834(A1) |
申请公布日期 |
2007.09.27 |
申请号 |
US20060582720 |
申请日期 |
2006.10.17 |
申请人 |
HAVERTY MICHAEL G;CHEN TIM T;SHANKAR SADASIVAN |
发明人 |
HAVERTY MICHAEL G.;CHEN TIM T.;SHANKAR SADASIVAN |
分类号 |
H01L21/31 |
主分类号 |
H01L21/31 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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