发明名称 |
DEVICE FOR CONTACT BY ADHESION TO A GLASS OR SEMICONDUCTOR PLATE (WAFER) SURFACE OF THE LIKE, AND SYSTEM FOR GRIPPING SUCH A PLATE COMPRISING SUCH A DEVICE |
摘要 |
1. Device (1) for contact by adhesion to a glass or semiconductor plate (3) (wafer) surface (2) or the like, comprising: a base (10) including a flexible material (4) equipped with an adhesive contact surface (5) intended to be attached to said plate surface (2) by adhesion, means (6) for differentiating the separation resistance between said adhesive contact surface (5) made of the flexible material (4) and the surface (2) of the plate (3), in a direction (7) perpendicular to the adhesive contact surface (5) and in a direction (8) parallel to said adhesive contact surface (5). |
申请公布号 |
WO2007107885(A2) |
申请公布日期 |
2007.09.27 |
申请号 |
WO2007IB01667 |
申请日期 |
2007.03.23 |
申请人 |
RECIF TECHNOLOGIES;GAUDON, ALAIN;HADDAD, FLORENT |
发明人 |
GAUDON, ALAIN;HADDAD, FLORENT |
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