| 发明名称 |
CIRCUIT FOR PROTECTING DUT, METHOD FOR PROTECTING DUT, TESTING APPARATUS AND TESTING METHOD |
| 摘要 |
A circuit for protecting a DUT is disposed in parallel with a DUT which is supplied with current via wirings and switchable between conducting and non-conducting state. The circuit is switchable between conducting and non-conducing state and switched from non-conducting state to conducting state as the DUT is switched from conducting state to non-conducting state.
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| 申请公布号 |
US2007223156(A1) |
申请公布日期 |
2007.09.27 |
| 申请号 |
US20070689149 |
申请日期 |
2007.03.21 |
| 申请人 |
TOKYO ELECTRON LIMITED |
发明人 |
KUMAGAI YASUNORI;SHINOZAKI DAI;KOMATSU SHIGEKAZU;SAKAMOTO KATSUAKI |
| 分类号 |
H02H9/00 |
主分类号 |
H02H9/00 |
| 代理机构 |
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代理人 |
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