| 发明名称 |
FLUID BEARING, FLUID BEARING, STAGE SYSTEM AND ALIGNER |
| 摘要 |
<P>PROBLEM TO BE SOLVED: To suppress an unexpected behavior even when a recess is present in a base member. <P>SOLUTION: A fluid bearing comprises a first fluid blowoff part 11 provided inside a groove part 14 formed in a first surface 10A of a first member and a second fluid blowoff parts 21A, 21B provided to an area in the first surface 10A different from the groove part 14. <P>COPYRIGHT: (C)2007,JPO&INPIT |
| 申请公布号 |
JP2007247704(A) |
申请公布日期 |
2007.09.27 |
| 申请号 |
JP20060069194 |
申请日期 |
2006.03.14 |
| 申请人 |
NIKON CORP |
发明人 |
AOYAMA TOSHIRO;KAKINUMA YASUHIRO;IWASAKI YOSHIMASA;KOBAYASHI YOSHIYUKI |
| 分类号 |
F16C32/06;F16C33/02;G12B5/00;H01L21/027;H01L21/68 |
主分类号 |
F16C32/06 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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