| 摘要 |
PROBLEM TO BE SOLVED: To provide a sealed electronic component in which characteristics are not deteriorated due to a seal. SOLUTION: A sealing filter 1 comprises a filter element 11 including a functional part 111 to excite mechanical vibration, and a substrate 14 on which the filter element 11 is mounted. The filter element 11 is mounted on the substrate 14 by confronting a functional part forming face 11a of the filter element 11 with the functional part 111 formed thereon and an element mounting face 14a of the substrate 14 to mount the filter element thereon, and performing flip-chip bonding between a pad P11 at the side of the filter element 11 and a pad P14 at the side of the substrate 14 through a gold bump 19. The filter element 11 is hollow-sealed by a side filling method in order to prevent a floating object or steam in the air from operating upon the functional part 111 to deteriorate characteristics. On the functional part forming face 11a of the filter element 11, a partition wall 18 is provided while preventing a resin sealing agent 17 before curing from reaching the functional part 111. COPYRIGHT: (C)2007,JPO&INPIT
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