| 摘要 |
A method for manufacturing a semiconductor device includes the steps of: forming a first dielectric film on a substrate; etching the first dielectric film in a plug forming region to form a first via hole; forming a first plug electrode in the first via hole; forming a conductive film on the first dielectric film where the first plug electrode is formed; selectively etching the conductive film to form a local wiring on the first plug electrode and to form a pad layer on the first dielectric film in a specified region; forming a second dielectric film on the first dielectric film, thereby covering the local wiring and the pad layer; selectively etching the second dielectric film, thereby forming a second via hole in the second dielectric film with the local wiring as a bottom surface, and an opening section in the second dielectric film with the pad layer as a bottom surface; forming a metal film on the second dielectric film, thereby embedding the second via hole and the opening section; and applying a CMP processing to the metal film to remove the metal film on the second dielectric film, thereby forming a second plug electrode in the second via hole and forming an alignment mark on the pad layer.
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