发明名称 CARBON NANOTUBE DEVICE AND PROCESS FOR PRODUCING THE SAME
摘要 <p>A carbon nanotube, which is disposed astride a source electrode (7), a TiO<SUB>2</SUB> film (5) overlying a gate electrode (6), and a drain electrode (8), is formed. Thereafter, the carbon nanotube is heated to form an n-type carbon nanotube (9n). Subsequently, ultraviolet light corresponding to the band gap of the TiO<SUB>2</SUB> film (5) is applied to the TiO<SUB>2</SUB> film (5). As a result, active oxygen is produced from oxygen in the gas and/or oxygen excessively incorporated within the TiO<SUB>2</SUB> film (5) through photocatalytic action, and the n-type carbon nanotube (9n) only in its part located immediately above the TiO<SUB>2</SUB> film (5) is converted to a p-type carbon nanotube (9p).</p>
申请公布号 WO2007108122(A1) 申请公布日期 2007.09.27
申请号 WO2006JP305828 申请日期 2006.03.23
申请人 FUJITSU LIMITED;NAKAMURA, SHUNJI 发明人 NAKAMURA, SHUNJI
分类号 H01L29/06;H01L21/331;H01L29/73;H01L29/786 主分类号 H01L29/06
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