| 摘要 |
PROBLEM TO BE SOLVED: To provide unique optical components of a large variety in optical and physical characteristics. SOLUTION: The optical component P has a cover layer F formed on the surface of a substrate S. The cover layer F is formed by laminating thin films made of materials selected from the group consisting of silicon oxynitride, aluminum oxynitride, silicon nitride, aluminum nitride, aluminum oxide, and silicon oxide. Since the thin films are formed by selecting materials from the group consisting of silicon oxynitride, aluminum oxynitride, silicon nitride, aluminum nitride, aluminum oxide, and silicon oxide, it becomes possible to provide optical components of a larger variety in optical and physical characteristics than in the case using only two kinds of materials, titanium dioxide and silicon dioxide as before. COPYRIGHT: (C)2007,JPO&INPIT
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