| 摘要 |
PROBLEM TO BE SOLVED: To provide a pressure sensor element that is less likely to degrade due to friction or the like with respect to fluids. SOLUTION: The pressure sensor element includes a crystal plate 2 and electrodes 3 provided on both principal planes of the plate 2. The electrode 3 comprises a metal plate, made of one from among Ti, Mg, Al, Fe, Ni, Sn, Au and Pt. The surface of the crystal plate 2 is mirror-finished, and the surface of the metallic plate is also mirror-finished. The metallic plate is fixed to the crystal plate 2 by ion-bonding by applying plasma, while they are overlapped. COPYRIGHT: (C)2007,JPO&INPIT
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