| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a method of manufacturing a single-layered or multilayered metal structure using a LIGA technique. <P>SOLUTION: In this method, a photoresist layer is placed on a flat metal substrate, a photoresist mold is prepared by irradiation, electron bombardment or ion bombardment, a metal or alloy is electroplated in the mold, the electrocast metal structure is separated from the substrate, the photoresist is cut off from the metal structure, and the metal substrate is used as an agent involved in formation of at least one surface of the metal structure other than a surface formed by the flat surface of the substrate. <P>COPYRIGHT: (C)2007,JPO&INPIT</p> |
