| 摘要 |
PROBLEM TO BE SOLVED: To provide a capacitive pressure sensor having full joining strength between substrates even when having a drawer electrode in a joining region between the substrates, thus demonstrating full sensor property. SOLUTION: This capacitive pressure sensor optimizes the projection quantity h of a contact layer in the joining region 20b and the distance W from an outer end of an unjoining region A generated in the joining region 20b to an end of a cavity 12. That is, since the distance W from the outer end of the unjoining region A generated in the joining region 20b to the end of the cavity 12 is about 150μm or more and the projection quantity h of the contact layer 15 from the surface of a glass substrate 20 is about 3000Åor less, the sensor can be securely joined between the substrates even when having the drawer electrode in the joining region between the substrates, thus demonstrating full sensor property. COPYRIGHT: (C)2007,JPO&INPIT
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