| 摘要 |
PROBLEM TO BE SOLVED: To provide an apparatus for measuring semiconductor device characteristics, capable of facilitating parallel measurement of semiconductor devices. SOLUTION: The apparatus for measuring the semiconductor device characteristics for measuring the characteristics of a plurality of semiconductor devices by means of a plurality of measurement machines for the respective devices, includes a parallel measurement possibility determining means for identifying a set of a semiconductor device and measurement functions, with which measurements are executable in parallel, based on connection information of the semiconductor device among the plurality of devices and a plurality of measurement function parts, by using a first abstract name for abstractly specifying the plurality of measurement machines of the measurement function of the semiconductor device which can be measured in parallel with the determining means. COPYRIGHT: (C)2007,JPO&INPIT
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