发明名称 Electric structure for e.g. dynamic RAM, has layer area arranged at surface area of solid electrolyte layer and electrode layer, where layer area exhibits oxygen concentration higher than that of solid electrolyte layer and electrode layer
摘要 <p>The structure (1) has a solid electrolyte layer (3) partially covered with an electrode layer (2). The solid electrolyte layer is located on another electrode layer (4). The layer (4) is located on a substrate (6) e.g. semiconductor wafer. A layer area (7) is arranged at a boundary surface area of the solid electrolyte layer and the electrode layer. The layer area exhibits an oxygen concentration higher than that of solid electrolyte layer and the electrode layer. Independent claims are also included for the following: (1) a method for manufacturing an electrical structure (2) a method for manufacturing a memory.</p>
申请公布号 DE102006011461(A1) 申请公布日期 2007.09.27
申请号 DE20061011461 申请日期 2006.03.13
申请人 INFINEON TECHNOLOGIES AG 发明人 SYMANCZYK, RALF
分类号 H01L27/24 主分类号 H01L27/24
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