发明名称 METHOD FOR DICING A WAFER
摘要 A method for dicing a wafer is provided. A layer of adhesive material is applied to the back surface of the wafer so as to provide a sufficient mechanical strength for the wafer during dicing process thereby preventing the dice diced from the wafer from undue chipping on the back surfaces and the side surfaces.
申请公布号 US2007224780(A1) 申请公布日期 2007.09.27
申请号 US20060466387 申请日期 2006.08.22
申请人 ADVANCED SEMICONDUCTOR ENGINEERING INC. 发明人 CHU FU TANG;CHUNG CHI YUAM
分类号 H01L21/00 主分类号 H01L21/00
代理机构 代理人
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