Method for producing piezoelectric actuator, ink-jet head, and ink-jet printer using aerosol deposition method, piezoelectric actuator, ink-jet head, and ink-jet printer

摘要

In a method for producing a piezoelectric actuator for an ink-jet head, a piezoelectric material layer included in thin film layers is formed on a vibration plate with AD method by jetting aerosol which contains particles of a piezoelectric material and a carrier gas, from a film-forming nozzle to the vibration plate while moving the film-forming nozzle relative to the vibration plate in a direction perpendicular to a scanning direction of the ink-jet head. Accordingly, even when thickness distribution occurs in the thin film layer formed with the AD method, it is possible to suppress, as much as possible, any degradation in printing quality due to the thickness distribution.