| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a shape variable mirror capable of obtaining a large deformation and which can be manufactured at a low cost in a simple process. <P>SOLUTION: The shape variable mirror 1 is composed of a substrate 2 and a piezoelectric body 3 in bulk. In the piezoelectric body 3, a mirror face 4 is formed and additionally a plurality of grooves 5a-5e filled with an electrically conductive member are formed with prescribed spaces apart in a manner surrounding the mirror face 4. The conductive members filled in respective grooves 5a-5e are electrically connected with one of the pair of common electrodes 7a, 7b provided in a manner crossing the grooves 5a-5e, and are formed into electrodes of alternately different polarity in the direction from the inside to the outside of the grooves 5a-5e. <P>COPYRIGHT: (C)2007,JPO&INPIT |
